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1. Name: sputter gold plating system 2. Function: Electrode production or used in superconducting / magnetic / optoelectronic components

1. Name: vacuum sputtering system 2. Function: high temperature superconducting YBCO film growth

1. Name: Sputter and ion etching system 2. Function: Al and FeSeTe film, ion beam etching 3. Specifications: vacuum 5x10E-5 torr, coating working pressure: 10E-3 ~ 10E-1 torr, Coating temperature: ~ 600C

1. Name: Vector Network Analyzer 2. Features: High Frequency Microwave Component Characterization 3. Specifications: Analysis Band ~ 3MHz ~ 40 GHz

1. Name: MPMS SQUID, Ministry of Science and Technology Precious Instrument 2. Function: Magnetic (MT, MH) Measurement Hall efffect, IV Measurement 3. Specifications: Magnetic Field: 0 ~ 7T Temperature : 2 ~ 350K

1. Name: Sputter system 2. Function: Al-doped ZnO film / LaSrCuO giant magnetoresistive film growth 3. Specifications: Vacuum 5x10E-5 torr Working pressure: 10E-3 ~ 10E-1 torr Operating temperature: ~ 700C

1. Name: Laser evaporation system 2. Function: High quality YBaCuO film, LaCaMnO film or multilayer film sample production.

3. Specifications: Vacuum ~ 10E-3 torr, working pressure ~ 10E-1 torr

Operating temperature: 700C, laser specifications: KrF laser 248nm, Pulse energy ~ 100mJ, Repetition rate: 10Hz

Chemical yard

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1. Name: MPMS3 SQUID, Ministry of Science and Technology Precious Instrument 2. Function: Magnetic (MT, MH) Measurement Hall efffect, IV Measurement 3. Specifications: Magnetic Field: 0 ~ 7T Temperature : 2 ~ 350K

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